SmartFactory Defect Source

Accelerate root cause analysis and minimize equipment downtime

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How can semiconductor manufacturers identify the source of an out-of-control event faster?

SmartFactory Defect Source uses AI to troubleshoot Out-of-Control (OOC) defect events in semiconductor manufacturing. By automatically identifying defect source layers, it helps engineers accelerate root cause analysis and reduce manual troubleshooting.
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Why choose SmartFactory Defect Source?

SmartFactory Defect Source helps teams make faster decisions, reduce engineering effort, and shorten equipment stop-loss time during defect investigations.

Proven production results include:

50%+ reduction in time-to-decision for defect source identification.

Hours-to-seconds improvement for automated defect source ID and root cause analysis triggered by OOC events.

90% reduction in manual troubleshooting effort for yield engineers.

What can you gain from our approach?

Faster root cause analysis

  • Reduces the delay between detection and investigation.
  • Provides quick insight into where to focus corrective action.

More efficient use of engineering resources

  • Reduces reliance on manual troubleshooting and expert-only workflows.
  • Helps preserve knowledge that is often held by a few experienced engineers.
  • Enables engineers to work through an intuitive, web-based troubleshooting storyline without requiring data science expertise.

Better use of existing manufacturing data and systems

  • Builds on top of existing DMS investments rather than replacing them.
  • Integrates with systems such as Klarity, Discover, and in-house solutions using standard protocols and file types including KLARF and TIFF.
  • Combines inspection and review data from AOI, SEM, TEM, and wafer maps to provide more comprehensive defect analysis.